A Temperature-Insensitive Resonant Pressure Micro Sensor Based on Silicon-on-Glass Vacuum Packaging
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Sensors
سال: 2019
ISSN: 1424-8220
DOI: 10.3390/s19183866